Vibrational modes of MEMS resonators
- Author(s):
- Lokhre,S.G. ( Tata Institute of Fundamental Research )
- Virwani,K.
- Gajanan,B.
- Pai,S.P.
- Apte,P.R.
- Publication title:
- Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3903
- Pub. Year:
- 1999
- Page(from):
- 32
- Page(to):
- 41
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819435132 [0819435139]
- Language:
- English
- Call no.:
- P63600/3903
- Type:
- Conference Proceedings
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