Programmable MEMS capacitor arrays
- Author(s):
- Duewer,B.E. ( North Carolina State Univ. )
- Wilson,J.M.
- Winick,D.A.
- Franzon,P.D.
- Publication title:
- Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3893
- Pub. Year:
- 1999
- Page(from):
- 262
- Page(to):
- 271
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434944 [0819434949]
- Language:
- English
- Call no.:
- P63600/3893
- Type:
- Conference Proceedings
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