Advanced rf CMOS technology

Advanced rf CMOS technology

Author(s):

Iwai,H. ( Tokyo Institute of Technology )

Publication title:

Design, characterization, and packaging for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3893

Pub. Year:

1999

Page(from):

10

Page(to):

19

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819434944 [0819434949]

Language:

English

Call no.:

P63600/3893

Type:

Conference Proceedings

Details

TDL ID:	ZA00017634
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Design, characterization, and packaging for MEMS and microelectronics
Conf. info. (Number):	1999
Conf. info. (Venue):	Royal Pines Resort, Queensland, Australia
Conf. info. (Date):	1999.10.27-1999.10.29

Similar Items:

1 Conference Proceedings Advanced rf CMOS technology Iwai,H., Ohguro,T., Morifuji,E., Yoshitomi,T., Kimijima,H., Momose,H.S., Inoh,K., Nii,H., Katsumata,Y. SPIE - The International Society for Optical Engineering	7 Conference Proceedings Si Channel Surface Dependence of Electrical Characteristics in Ultra-Thin Gate Oxide CMOS* Momose, H.S. Electrochemical Society
2 Conference Proceedings Advanced rf CMOS technology Iwai,H., Ohguro,T., Morifuji,E., Yoshitomi,T., Kimijima,H., Momose,H.S., Inoh,K., Nii,H., Katsumata,Y. SPIE - The International Society for Optical Engineering	8 Conference Proceedings Performance of immersion lithography for 45-nm-node CMOS and ultra-high density SRAM with 0.25um2 S. Mimotogi, F. Uesawa, M. Tominaga, H. Fujise, K. Sho, M. Katsumata, H. Hane, A. Ikegami, S. Nagahara, T. Ema, M. … SPIE - The International Society of Optical Engineering
3 Conference Proceedings Advanced rf CMOS technology Iwai,H., Ohguro,T., Morifuji,E., Yoshitomi,T., Kimijima,H., Momose,H.S., Inoh,K., Nii,H., Katsumata,Y. SPIE - The International Society for Optical Engineering	9 Conference Proceedings Study of Self-Heating Effect on Device Performance of Sub-0.1um SOI MOSFETs Including Velocity Overshoot Kawanaka, S., Matsuzawa, K., Inoh, K., Katsumata, Y., Yoshimi, M., Ishiuchi, H. Electrochemical Society
4 Conference Proceedings Ultrashallow Junctions and Salicide Technology for Advanced CMOS Devices Ohguro, T., Nakamura, S., Saito, M., Ono, S., Harakawa, H., Morifuji, E., Yoshitomi, T., Morimoto, T., Momose, H.S., … Electrochemical Society	10 Conference Proceedings Ultra-Thin Gate SiO2 Technology Iwal, H., Momose, H.S., Ohrni, S.-I. Electrochemical Society
5 Conference Proceedings Silicon Epitaxy and Its Application to RF ICs Ohguro, T., Naruse, H., Sugaya, H., Nakamura, S., Sugiyama, N., Morifuji, E., Kimijima, H., Yoshitomi, T., Morimoto, T., … Electrochemical Society	11 Conference Proceedings METAL GATES FOR ADVANCED CMOS TECHNOLOGIES KiTTL, J. A. 1, PAWLAK, M. A., LAUWERS, A., SCHRAM, T., POURTOIS, G., VELOSO, A., Yu, H., HOFFMANN, T., DEMEURISSE, C., … Electrochemical Society
6 Conference Proceedings Ultrathin Oxide Technology Momose, H.S., Ohguro, T., Nakamura, S., Katsumata, Y., Iwai, H. Electrochemical Society	12 Conference Proceedings Advanced Metal Gate FinFET CMOS TEchnology Y. Liu, T. Matsukawa, K. Endo, M. Masahara, S. Ouchi Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12