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Influence of IMP copper flash layer on the properties of copper films deposited by metal organic chemical vapor deposition

Author(s):
Li,C.Y. ( Institute of Microelectronics )
Zhang,D.H.
Qian,Y.
Narayanan,B.
Wu,J.J.
Yu,B.
Jiang,Z.X.
Foo,P.D.
Xie,J.
Zhang,Q.
Yoon,S.F.
6 more
Publication title:
Multilevel Interconnect Technology III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3883
Pub. date:
1999
Page(from):
46
Page(to):
49
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434807 [0819434809]
Language:
English
Call no.:
P63600/3883
Type:
Conference Proceedings

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