Scaling the gate dielectric
- Author(s):
- Eaglesham,D.J. ( Lucent Technologies/Bell Labs. )
- Publication title:
- Multilevel Interconnect Technology III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3883
- Pub. Year:
- 1999
- Page(from):
- 2
- Page(to):
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819434807 [0819434809]
- Language:
- English
- Call no.:
- P63600/3883
- Type:
- Conference Proceedings
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