Blank Cover Image

High-resolution DUV inspection system for 150-nm generation masks

Author(s):
Tabata,M. ( Toshiba Corp. )
Tsuchiya,H.
Sanada,Y.
Nishizaka,T.
Hirazawa,H.
Kobayashi,N.
Nagai,H.
Watanabe,T.
Oohashi,K.
Inoue,H.
Nomura,T.
Ono,A.
7 more
Publication title:
19th Annual Symposium on Photomask Technology : 15-17 September 1999, Monterey, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3873
Pub. date:
1999
Vol.:
Part1
Page(from):
138
Page(to):
146
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780849434686 [084943468X]
Language:
English
Call no.:
P63600/3873
Type:
Conference Proceedings

Similar Items:

Tsuchiya, H., Isomura, I., Nakashima, K., Yamashita, K., Watanabe, T., Nishizaka, T., Ikeda, H., Sawa, E., Ikeda, M.

SPIE-The International Society for Optical Engineering

Fujiwara, T., Inoue, H., Okuda, K., Nomura, T., Tabata, M., Endo, S.

SPIE-The International Society for Optical Engineering

Oohashi,K., Inoue,H., Nomura,T., Ono,A., Tabata,M., Suzuki,H.

SPIE - The International Society for Optical Engineering

Tsuchiya,H., Isomura,I., Watanabe,T., Yamashita,K.

SPIE-The International Society for Optical Engineering

Tabata,M., Yamashita,K., Tsuchiya,H., Nomura,T., Inoue,H., Watanabe,T., Tojo,T., Yoshino,H.

SPIE-The International Society for Optical Engineering

Yoshikawa, R., Tanizaki, H., Watanabe, T., Inoue, H., Ogawa, R., Endo, S., Ikeda, M., Takahashi, Y., Watanabe, H.

SPIE - The International Society of Optical Engineering

Inoue,H., Okuda,K., Nomura,T., Tsuchiya,H., Tabata,M.

SPIE-The International Society for Optical Engineering

Oohashi,K., Fujiwara,T., Nomura,T., Ono,A.

SPIE-The International Society for Optical Engineering

Tojo, T., Hirano, R., Tsuchiya, H., Oaki, J., Nishizaka, T., Sanada, Y., Matsuki, K., Isomura, I., Ogawa, R., Kobayashi, …

SPIE - The International Society of Optical Engineering

Okayasu, T., Hayase, Y., Ono,A., Watanabe,D., Mori,H., Nomura, T.

SPIE - The International Society of Optical Engineering

H. Tsuchiya, M. Tokita, T. Nomura, T. Inoue

Society of Photo-optical Instrumentation Engineers

Kawamura,E., Nagai,K., Kanemitsu,H., Tabata,Y., Inoue,S.

SPIE - The International Society for Optical Engineering

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12