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TuD3:Crystallization behavior of sputter-deposited nitrogen-doped amorphous Ge2Sb2Te5 thin films

Author(s):
Seo,H. ( LG Corporate Institute of Technology )
Jeong,T.-H.
Park,J.-W.
Yeon,C.
Lee,D.-C.
Kim,S.-J.
Lim,H.-J.
Kim,S.-Y.
3 more
Publication title:
ISOM/ODS '99 : joint international symposium on Optical Memory and Optical Data Strage 1999, 11-15 July 1999 Sheraton Kauai Resort, Koloa, Howaii
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3864
Pub. Year:
1999
Page(from):
116
Page(to):
118
Pub. info.:
Bellingham, Washington: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819434586 [0819434582]
Language:
English
Call no.:
P63600/3864
Type:
Conference Proceedings

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