3D profilometry based on the white light interferometer for rough surfaces.

3D profilometry based on the white light interferometer for rough surfaces.

Author(s):

Ryoo,S. ( Kwangju Institute of Science and Technology )
Seong,Y.K.
Choi,T.S.

Publication title:

Optical Manufacturing and Testing III

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3782

Pub. Year:

1999

Page(from):

619

Page(to):

626

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432681 [0819432687]

Language:

English

Call no.:

P63600/3782

Type:

Conference Proceedings

Details

TDL ID:	ZA00017624
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Optical Manufacturing and Testing
Conf. info. (Number):	1999 : 3rd
Conf. info. (Venue):	Denver, CO, USA
Conf. info. (Date):	1999.07.20-1999.07.23

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