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Two error sources in grating projection profilometry:analysis and compensation

Author(s):
Publication title:
Optical Manufacturing and Testing III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3782
Pub. Year:
1999
Page(from):
554
Page(to):
558
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819432681 [0819432687]
Language:
English
Call no.:
P63600/3782
Type:
Conference Proceedings

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