Surface shape measurement using a wavelength-scanning Fizeau interferometer

Author(s):

• Yamamoto,A. ( RIKEN-The Institute of Physical and Chemical Research )
• Yamaguchi,I.
• Yano,M.

Publication title:

Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3740

Pub. Year:

1999

Page(from):

614

Page(to):

617

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819432148 [0819432148]

Language:

English

Call no.:

P63600/3740

Type:

Conference Proceedings