New deep-UV microscope
- Author(s):
- Publication title:
- Optical engineering for sensing and nanotechnology (ICOSN '99) : 16-18 June 1999, Yokohama, Japan
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3740
- Pub. Year:
- 1999
- Page(from):
- 394
- Page(to):
- 397
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819432148 [0819432148]
- Language:
- English
- Call no.:
- P63600/3740
- Type:
- Conference Proceedings
Similar Items:
SPIE-The International Society for Optical Engineering |
7
Conference Proceedings
MA1:Deep-UV mastering with a write compensation technique realizing over 20-GB/Iayer capacity disk.
SPIE - The International Society for Optical Engineering |
2
Conference Proceedings
Deep-UV lithography using continuous-wave 266-nm radiation from an all solid state frequency quadrupled Nd:YAG laser
Society of Photo-optical Instrumentation Engineers |
8
Conference Proceedings
Characterization of localized strain of crystals in nano-scale by tip-enhanced Raman spectroscope and microscope
Society of Photo-optical Instrumentation Engineers |
Trans Tech Publications |
SPIE-The International Society for Optical Engineering |
Trans Tech Publications |
10
Conference Proceedings
Novel LEDs using unique lateral p-n junctions on GaAs (311)A patterned substrates
SPIE - The International Society of Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
6
Conference Proceedings
Snapshot complete imaging polarimeter using Savart plates (Invited Paper) [6295-09]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |