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Properties of boron-carbon-nitrogen ternary thin films synthesized by pulsed laser deposition

Author(s):
Ren,Z.M. ( National Univ.of Singapore )
Lu,Y.-F.
Mai,Z.H.
Cheong,B.A.
Chow,S.K.
Wang,J.P.
Chong,T.C.
2 more
Publication title:
Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3618
Pub. Year:
1999
Page(from):
520
Page(to):
528
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430885 [0819430889]
Language:
English
Call no.:
P63600/3618
Type:
Conference Proceedings

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