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Crystallinities and light-emitting properties of nanostructured SiGe alloy prepared by pulsed laser ablation in inert background gases

Author(s):
Yoshida,T. ( Matsushita Research Institute Tokyo,Inc. )
Yamada,Y.
Suzuki,N.
Makino,T.
Orii,M.T.
Murakami,K.
Geohegan,D.B.
Lowndes,D.H.
Aziz,M.J.
4 more
Publication title:
Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3618
Pub. Year:
1999
Page(from):
512
Page(to):
519
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430885 [0819430889]
Language:
English
Call no.:
P63600/3618
Type:
Conference Proceedings

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