Pulsed laser deposition of Ti:sapphire thin films using high-speed rotating target

Pulsed laser deposition of Ti:sapphire thin films using high-speed rotating target

Author(s):

Nakata,Y. ( Kyushu Univ. )

Publication title:

Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

3618

Pub. Year:

1999

Page(from):

504

Page(to):

511

Pub. info.:

Bellingham, Wash.: SPIE - The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819430885 [0819430889]

Language:

English

Call no.:

P63600/3618

Type:

Conference Proceedings

Details

TDL ID:	ZA00017609
Series ID:	PA00000029
Conf. info. (Name):	Photonics West : Laser Applications in Microelectronic and Optoelectronic Manufacturing
Conf. info. (Number):	1999 : 4th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	1999.01.25-1999.01.27

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