Condensation of vapor and nanoclusters formation within the vapor plume produced by nanosecond-laser ablation of Si,Ge,and C
- Author(s):
- Luk'yanchuk,B.S. ( General Physics Institute )
- Marine,W.
- Anisimov,S.I.
- Simakina,G.A.
- Publication title:
- Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3618
- Pub. Year:
- 1999
- Page(from):
- 434
- Page(to):
- 452
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430885 [0819430889]
- Language:
- English
- Call no.:
- P63600/3618
- Type:
- Conference Proceedings
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