Micromachining of glass materials by laser-induced plasma-assisted ablation(LIPAA)using a conventional nanosecond laser
- Author(s):
- Zhang,J. ( RIKEN-Institute of Physical and Chemical Research )
- Sugioka,K.
- Midorikawa,K.
- Publication title:
- Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3618
- Pub. Year:
- 1999
- Page(from):
- 363
- Page(to):
- 369
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430885 [0819430889]
- Language:
- English
- Call no.:
- P63600/3618
- Type:
- Conference Proceedings
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