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Laser direct writing of circuit elements and sensors

Author(s):
Pique,A. ( Naval Research Lab. )
Chrisey,D.B.
Auyeung,R.C.Y.
Lakeou,S.
Chung,R.
McGill,R.A.
Wu,P.K.
Duignan,M.T.
Fitz-Gerald,J.
Wu,H.D.
5 more
Publication title:
Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3618
Pub. Year:
1999
Page(from):
330
Page(to):
339
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430885 [0819430889]
Language:
English
Call no.:
P63600/3618
Type:
Conference Proceedings

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