Laser surface cleaning of electronic materials
- Author(s):
- Lu,Y.F. ( National Univ.of Singapore )
- Song,W.D.
- Zhang,Y.
- Zheng,Y.W.
- Publication title:
- Laser applications in microelectronic and optoelectronic manufacturing IV : 25-27 January 1999, San Jose, California
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3618
- Pub. Year:
- 1999
- Page(from):
- 278
- Page(to):
- 289
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819430885 [0819430889]
- Language:
- English
- Call no.:
- P63600/3618
- Type:
- Conference Proceedings
Similar Items:
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Nanostructure Fabrication Using Pulsed Lasers and Near-field Optical Properties of Sub-micron Particles
Materials Research Society |
SPIE - The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
9
Conference Proceedings
Theoretical model and experimental study for dry and steam laser cleaning (Invited Paper)
SPIE-The International Society for Optical Engineering |
4
Conference Proceedings
"Laser surface cleaning: basic understanding, engineering efforts, and technical barriers"
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
Materials Research Society |
11
Conference Proceedings
Particle-enhanced near-field optical effect and laser writing for nanostructure fabrication
SPIE-The International Society for Optical Engineering |
Materials Research Society |
12
Conference Proceedings
Particle on the surface: basic physical problems related to laser cleaning
SPIE-The International Society for Optical Engineering |