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Dependence of the HfO2 thin film structure on the momentum transfer in ion-beam-assisted deposition

Author(s):
Publication title:
Laser-Induced Damage in Optical Materials: 1998
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3578
Pub. date:
1999
Page(from):
154
Page(to):
161
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430458 [0819430455]
Language:
English
Call no.:
P63600/3578
Type:
Conference Proceedings

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