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Coated optics for DUV excimer laser applications

Author(s):
Ullmann,J. ( Carl Zeiss )
Mertin,M.
Lauth,H.
Bernitzki,H.
Mann,K.R.
Ristau,D.
Arens,W.
Thielsch,R.
Kaiser,N.
4 more
Publication title:
Laser-Induced Damage in Optical Materials: 1998
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3578
Pub. Year:
1999
Page(from):
64
Page(to):
64
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819430458 [0819430455]
Language:
English
Call no.:
P63600/3578
Type:
Conference Proceedings

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