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Some aspect of MEMS technology

Author(s):
Publication title:
Fourth all-russian seminar on problems of theoretical and applied electron optics : 21-22 October 1999, Moscow, Russia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4187
Pub. Year:
2000
Page(from):
66
Page(to):
69
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819438508 [0819438502]
Language:
English
Call no.:
P63600/4187
Type:
Conference Proceedings

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