CrOxFy as a material for attenuated phase-shift masks in ArF lithography
- Author(s):
Nakazawa,K. ( Semiconductor Leading Edge Technologies,Inc. ) Matsuo,T. Onodera,T. Morimoto,H. Mohri,H. Hatsuta,C. Hayashi,N. - Publication title:
- Photomask and Next-Generation Lithography Mask Technology VII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4066
- Pub. Year:
- 2000
- Page(from):
- 682
- Page(to):
- 687
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437020 [0819437026]
- Language:
- English
- Call no.:
- P63600/4066
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
ZrSiO:a new and robust material for attenuated phase-shift mask in ArF Lithography
SPIE - The International Society for Optical Engineering |
7
Conference Proceedings
Development of ZrSiO attenuated phase-shift mask for ArF excimer laser lithography
SPIE - The International Society for Optical Engineering |
SPIE - The International Society of Optical Engineering |
8
Conference Proceedings
Challenge to sub-0.1-ヲフm pattern fabrication using an alternating phase-shifting mask in ArF lithography
SPIE - The International Society for Optical Engineering |
3
Conference Proceedings
Investigation of attenuated phase-shifting mask material for 157-nm lithography
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Development of attenuating PSM shifter for F2 and high-transmission ArF lithography
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
10
Conference Proceedings
Development and evaluation of chromium-based attenuated phase-shift masks for DUV exposure
Society of Photo-optical Instrumentation Engineers |
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |
6
Conference Proceedings
Feasibility study of an embedded transparent phase-shifting mask in ArF lithography
SPIE - The International Society for Optical Engineering |
SPIE - The International Society for Optical Engineering |