ArF halftone PSM cleaning process optimization for next-generation lithography
- Author(s):
- Son,Y.-S. ( DuPont Photomasks Korea Ltd. )
- Jeong,S.-H.
- Kim,J.-B.
- Kim,H.-S.
- Publication title:
- Photomask and Next-Generation Lithography Mask Technology VII
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 4066
- Pub. Year:
- 2000
- Page(from):
- 416
- Page(to):
- 423
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819437020 [0819437026]
- Language:
- English
- Call no.:
- P63600/4066
- Type:
- Conference Proceedings
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