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Mask critical dimension error on optical lithography

Author(s):
Eom,T.-S. ( Hyundai Electronics Industries Co.,Ltd. )
Koo,S.-S.
Paek,S.-W.
Kim,H.-B.
Ahn,C.-N.
Baik,K.-H.
1 more
Publication title:
Photomask and Next-Generation Lithography Mask Technology VII
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
4066
Pub. Year:
2000
Page(from):
32
Page(to):
39
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819437020 [0819437026]
Language:
English
Call no.:
P63600/4066
Type:
Conference Proceedings

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