Major improvements in mask CD metrology:enhanced performance on attenuated phase-shift masks,corner rounding measurements,and improved measurement automation
- Author(s):
Schluter,G. ( Leica Microsystems Wetzlar GmbH ) Scheuring,G. Falk,G. Bruck,H.-J. Schatz,T. Lehnigk,S. - Publication title:
- 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 3996
- Pub. Year:
- 2000
- Page(from):
- 134
- Page(to):
- 138
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society for Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819436146 [0819436143]
- Language:
- English
- Call no.:
- P63600/3996
- Type:
- Conference Proceedings
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