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Reticle imaging and metrology using a CD-SEM at IMEC

Author(s):
James,A. ( KLA-Tencor )
Felten,F.
Polli,M.
England,J.G.
Marschner,T.
Vandenberghe,G.
1 more
Publication title:
16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
3996
Pub. Year:
2000
Page(from):
128
Page(to):
133
Pub. info.:
Bellingham, Wash.: SPIE - The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819436146 [0819436143]
Language:
English
Call no.:
P63600/3996
Type:
Conference Proceedings

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