Kinetics of Damage Generation on Single-Crystal Silicon Surfaces: The Influence of Lubricant Adsorption

Kinetics of Damage Generation on Single-Crystal Silicon Surfaces: The Influence of Lubricant Adsorption

Author(s):

Publication title:

Surface science investigations in tribology : experimental approaches

Title of ser.:

ACS symposium series

Ser. no.:

485

Pub. Year:

1992

Page(from):

231

Pub. info.:

Washington, DC: American Chemical Society

ISSN:

00976156

ISBN:

9780841222052 [0841222053]

Language:

English

Call no.:

A05800/485

Type:

Conference Proceedings

Details

TDL ID:	ZA00017563
Series ID:	PA00000004
Conf. info. (Name):	National Meeting of the American Chemical Society
Conf. info. (Number):	201st
Conf. info. (Venue):	Atlanta, GA, USA
Conf. info. (Date):	1991.04.14-1991.04.19

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