THE PERFORMANCE STYDY OF ION IMPLANTER BASED MEDIUM ENERGY ION SPECTROSCOPY WITH SOLID STATE DETECTOR

THE PERFORMANCE STYDY OF ION IMPLANTER BASED MEDIUM ENERGY ION SPECTROSCOPY WITH SOLID STATE DETECTOR

Author(s):

Publication title:

Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

324

Pub. Year:

1994

Page(from):

409

Pub. info.:

Pittsburgh: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558992238 [1558992235]

Language:

English

Call no.:

M23500/324

Type:

Conference Proceedings

Details

TDL ID:	ZA00017537
Series ID:	PA00000011
Conf. info. (Name):	Symposium on diagnostic techniques for semiconductor materials processing
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.02

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