REAL-TIME SURFACE AND NEAR-SURFACE OPTICAL DIAGNOSTICS FOR EPITAXIAL GROWTH

REAL-TIME SURFACE AND NEAR-SURFACE OPTICAL DIAGNOSTICS FOR EPITAXIAL GROWTH

Author(s):: Aspnes, D. E.
Publication title:: Diagnostic techniques for semiconductor materials processing : Symposium held November 29-December 2, 1993, Boston, Massachusetts, U.S.A.
Title of ser.:: Materials Research Society symposium proceedings
Ser. no.:: 324
Pub. Year:: 1994
Page(from):: 3
Pub. info.:: Pittsburgh: MRS - Materials Research Society
ISSN:: 02729172
ISBN:: 9781558992238 [1558992235]
Language:: English
Call no.:: M23500/324
Type:: Conference Proceedings

Details

TDL ID:	ZA00017537
Series ID:	PA00000011
Conf. info. (Name):	Symposium on diagnostic techniques for semiconductor materials processing
Conf. info. (Number):	1993
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1993.11.29-1993.12.02

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