Synthesis of Crystalline Structures of CNx Thin Films Deposited on Sapphire, Quartz and Alumina Substrates

Synthesis of Crystalline Structures of CNx Thin Films Deposited on Sapphire, Quartz and Alumina Substrates

Author(s):

Alexandrescu, R.

Publication title:

Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.

Title of ser.:

Materials Research Society symposium proceedings

Ser. no.:

555

Pub. Year:

1999

Page(from):

413

Pub. info.:

Warrendale, PA.: MRS - Materials Research Society

ISSN:

02729172

ISBN:

9781558994614 [1558994610]

Language:

English

Call no.:

M23500/555

Type:

Conference Proceedings

Details

TDL ID:	ZA00017533
Series ID:	PA00000011
Conf. info. (Name):	Symposium on properties and processing of vapor-deposited coatings
Conf. info. (Number):	1998
Conf. info. (Venue):	Boston, MA, USA
Conf. info. (Date):	1998.11.30-1998.12.02

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