Gas Phase and Surface Kinetics of Diamond-Like Carbon Films Growth in PECVD Reactors
- Author(s):
- Publication title:
- Properties and processing of vapor-deposited coatings : symposium held November 30-December 2, 1998, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 555
- Pub. Year:
- 1999
- Page(from):
- 321
- Pub. info.:
- Warrendale, PA.: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558994614 [1558994610]
- Language:
- English
- Call no.:
- M23500/555
- Type:
- Conference Proceedings
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