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Ion Beam Techniques for Low-K Materials Characterization

Author(s):
Bakhru, H.
Kumar, A.
Kaplan, T.
Delarosa, M.
Fortin, J.
Yang, G.-R.
Lu, T.-M.
Kim, S.
Steinbruchel, C.
Tang, X.
Moore, J. A.
Wang, B.
McDonald, J.
Nitta, S.
Pisupatti, V.
Jain, A.
Wayner, P.
Plawsky, J.
Gill, W.
Jin, C.
15 more
Publication title:
Low-dielectric constant materials IV : symposium held April 14-16, 1998, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
511
Pub. Year:
1998
Page(from):
125
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994171 [1558994173]
Language:
English
Call no.:
M23500/511
Type:
Conference Proceedings

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