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Surface-Particle Interactions in the Chemical Mechanical Polishing Process

Author(s):
Publication title:
Surface-controlled nanoscale materials for high-added-value applications : symposium held November 30-December 3, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
501
Pub. Year:
1998
Page(from):
387
Pub. info.:
Warrendale, Penn: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558994065 [1558994068]
Language:
English
Call no.:
M23500/501
Type:
Conference Proceedings

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