Blank Cover Image

Pseudo-C11b Phase Formation of Titanium Disilicide During the C49 to C54 Transition

Author(s):
Publication title:
Phase transformations and systems driven far from equilibrium : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
481
Pub. Year:
1998
Page(from):
605
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993860 [155899386X]
Language:
English
Call no.:
M23500/481
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings KINETICS AND MECHANISM OF THE C49 TO C54 TITANIUM DISILICIDE POLYMORPHIC TRANSFORMATION

Ma, Z., Ramanath, G., Allen, L. H.

MRS - Materials Research Society
7 Conference Proceedings SILICON CONSUMPTION DURING SELF-ALIGNED TITANIUM SILICIDE FORMATION ON SHALLOW JUNCTIONS

Smith, P.L., Osburn, C.M., Wen, D.S., McGuire, G.

Materials Research Society
2 Conference Proceedings EVOLUTION OF STRESS DURING FORMATION OF TITANIUM DISILICIDE BY RTA AND TUBE FURNACE ANNEALING

Jongste, J.F., Loopstra, O.B., Janssen, G.C.A.M., Radelaar, S.

Materials Research Society
8 Conference Proceedings In Situ TEM Analysis of TiSi2 C49-C54 Transformations During Annealing

Gignac, L. M., Svilan, V., Clevenger, L. A., Cabral, C., Jr., Lavoie, C.

MRS - Materials Research Society
3 Conference Proceedings Kinetics and Mechanism of the C49 to C54 Titanium Disilicide Phase Transformation in Nitrogen Ambient

Nagabushnam, R. V., Sharan, S., Sandhu, G., Rakesh, V. R., Singh, R. K., Tiwari, P.

MRS - Materials Research Society
9 Conference Proceedings Titanium Germanosilicide Phase Formation During the Ti-Si1-xGex Solid Phase Reactions

Aldrich, D. B., Chen, Y. L., Sayers, D. E., Nemanich, R. J.

MRS - Materials Research Society
4 Conference Proceedings STRESS IN TITANIUM DISILICIDE LAYER, DURING AND AFTER FORMATION

Jongste,J. F., Prins, F.E., Janssen, G.C.A.M., Radelaar, S.

Materials Research Society
10 Conference Proceedings Formation and Characterization of SPE Grown Ultra-Thin Cobalt Disilicide Film

Qu, X-P., Ru, G-P., Li, B-Z., Detavernier, C., Meirhaeghe, R. L. Van, Cardon, F.

MRS - Materials Research Society
5 Conference Proceedings NUCLEATION, TRANSFORMATION AND AGGLOMERATION OF C54 PHASE TITANIUM DISILICIDE

Mann, R. W., Racine, C. A., Bass, R. S.

Materials Research Society
11 Conference Proceedings Effect of Boron Doping on the C49 to C54 Phase Transformation in Ti/Si(100) Bilayers

Quintero, A., Libera, M., Cabral, C., Jr., Clevenger, L. A., Harper, J. M. E.

MRS - Materials Research Society
6 Conference Proceedings Influence of Substrate Temperature During Sputter Deposition on the Subsequent Formation of Titanium Disilicide

Ozcan, A.S., Ludwig Jr., K.F., Cabral Jr., C., Lavoie, C., Harper, J.M.E.

Materials Research Society
12 Conference Proceedings CoSi AND CoSi2 PHASE FORMATION ON BULK AND SOI Si SUBSTRATES

Hsia, S. L., Tan, T. Y., Smith, P. L., McGuire, G. E.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12