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Recrystallization of Si-, As-, and BF2-Implanted, Bonded SOI

Author(s):
Publication title:
Phase transformations and systems driven far from equilibrium : symposium held December 1-5, 1997, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
481
Pub. Year:
1998
Page(from):
465
Pub. info.:
Warrendale, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993860 [155899386X]
Language:
English
Call no.:
M23500/481
Type:
Conference Proceedings

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