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Very Low Surface Roughness in Laser Crystallized Polycrystalline Silicon

Author(s):
Mourgues, K.
Pichon, L.
Raoult, F.
Mohammed-Brahim, T.
Briand, D.
Bonnaud, O.
Lemoine, D.
Boher, P.
Sthele, M.
Sthele, J. L.
5 more
Publication title:
Flat panel display materials III : symposium held March 31-April 3, 1997, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
471
Pub. Year:
1997
Page(from):
197
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993754 [1558993754]
Language:
English
Call no.:
M23500/471
Type:
Conference Proceedings

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