Patterning of LiGaO2 and LiAlO2 by Wet and Dry Etching
- Author(s):
Lee, J. W. Pearton, S. J. Abernathy, C. R. Wilson, R. G. Chai, B. L. Ren, F. Zavada, J. M. - Publication title:
- III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 449
- Pub. Year:
- 1997
- Page(from):
- 1041
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558993532 [1558993533]
- Language:
- English
- Call no.:
- M23500/449
- Type:
- Conference Proceedings
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