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Chemical Etching of AlN and InAlN in KOH Solutions

Author(s):
Vartuli, C. B.
Lee, J. W.
MacKenzie, J. D.
Pearton, S. J.
Abernathy, C. R.
Zolper, J. C.
Shul, R. J.
Ren, F.
3 more
Publication title:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
449
Pub. Year:
1997
Page(from):
1017
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
Language:
English
Call no.:
M23500/449
Type:
Conference Proceedings

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