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Structural Characteristics of MOCVD-Grown AlN Films with Different Carbon Concentration

Author(s):
Li, Yun-Xin
Salamanca-Riba, Lourdes
Spencer, M. G.
Wongchigul, K.
Zhou, P.
Tang, X.
Talyansky, V.
Venkatesan, T.
3 more
Publication title:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
449
Pub. Year:
1997
Page(from):
555
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
Language:
English
Call no.:
M23500/449
Type:
Conference Proceedings

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