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Low Pressure CVD of GaN from GaCl3 and NH3

Author(s):
Topf, M.
Koynov, S.
Fischer, S.
Dirnstorfer, I.
Kriegseis, W.
Burkhardt, W.
Meyer, B-K.
2 more
Publication title:
III-V nitrides : symposium held December 2-6, 1996, Boston, Massachusetts, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
449
Pub. date:
1997
Page(from):
307
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993532 [1558993533]
Language:
English
Call no.:
M23500/449
Type:
Conference Proceedings

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