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Trapping Behavior of Thin Siliconoxynitride Layers Prepared by Rapid Thermal Processing

Author(s):
Beyer, R.
Burghardt, H.
Reich, R.
Thomas, E.
Grambole, D.
Herrmann, F.
Scholz, T.
Albrecht, J.
Zahn, D. R. T.
Gessner, T.
5 more
Publication title:
Materials reliability in microelectronics VI : symposium held April 8-12, 1996, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
428
Pub. Year:
1996
Page(from):
421
Pub. info.:
Pittsburgh, Pa.: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558993310 [1558993312]
Language:
English
Call no.:
M23500/428
Type:
Conference Proceedings

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