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RTA-Preparation of β-FeSi2 Layers From MBE-Grown Fe-Si Films Deposited on Si and Relaxed SiGe (100) Substrates

Author(s):
Libezny, M.
Poortmans, J.
Dekoster, J.
Degroote, S.
Vantomme, A.
Lange, B. G. M. De
Langouche, G.
Nijs, J.
3 more
Publication title:
Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
Title of ser.:
Materials Research Society symposium proceedings
Ser. no.:
387
Pub. Year:
1995
Page(from):
407
Pub. info.:
Pittsburgh, PA: MRS - Materials Research Society
ISSN:
02729172
ISBN:
9781558992900 [1558992901]
Language:
English
Call no.:
M23500/387
Type:
Conference Proceedings

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