Simulation of Uniformity and Lifetime Effects in Collimated Sputtering
- Author(s):
Tait, R. N. Dew, S. K. Tsai, W. Hodul, D. Brett, M. J. Smy, T. - Publication title:
- Rapid thermal and integrated processing IV : symposium held April 17-20, 1995, San Francisco, California, U.S.A.
- Title of ser.:
- Materials Research Society symposium proceedings
- Ser. no.:
- 387
- Pub. Year:
- 1995
- Page(from):
- 107
- Pub. info.:
- Pittsburgh, PA: MRS - Materials Research Society
- ISSN:
- 02729172
- ISBN:
- 9781558992900 [1558992901]
- Language:
- English
- Call no.:
- M23500/387
- Type:
- Conference Proceedings
Similar Items:
MRS - Materials Research Society |
Electrochemical Society |
Materials Research Society |
MRS - Materials Research Society |
3
Conference Proceedings
Simulation of 3D films deposited by glancing angle deposition using 3D-films
MRS-Materials Research Society |
Electrochemical Society |
Electrochemical Society |
American Chemical Society |
Materials Research Society |
11
Conference Proceedings
Digital optical switches with reconfigurable output waveguide branches in InP
SPIE - The International Society of Optical Engineering |
6
Conference Proceedings
HIGH PURITY TITANIUM SILICIDE FILMS FORMED BY SPUTTER DEPOSITION AND RAPID THERMAL ANNEALING
Materials Research Society |
Electrochemical Society |