Force measurements of polysilicon thermal microactuators

Force measurements of polysilicon thermal microactuators

Author(s):

Reid,J.R. ( Air Force Institute of Technology )
Bright,V.M.
Comtois,J.H.

Publication title:

Micromachined devices and components II : 14-15 October 1996, Austin, Texas

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2882

Pub. Year:

1996

Page(from):

296

Page(to):

306

Pub. info.:

Bellingham, WA: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819422804 [0819422800]

Language:

English

Call no.:

P63600/2882

Type:

Conference Proceedings

Details

TDL ID:	ZA00017495
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachined Devices and Components
Conf. info. (Number):	1996 : 2nd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1996.10.14-1996.10.15

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