Blank Cover Image

Performance trade-offs for a surface micromachined microengine

Author(s):
Publication title:
Micromachined devices and components II : 14-15 October 1996, Austin, Texas
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2882
Pub. Year:
1996
Page(from):
182
Page(to):
191
Pub. info.:
Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422804 [0819422800]
Language:
English
Call no.:
P63600/2882
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Friction in surface-micromachined microengines

Miller,S.L., Sniegowski,J.J., LaVigne,G., McWhorter,P.J.

SPIE-The International Society for Optical Engineering
7 Conference Proceedings Characterization of the embedded micromechanical device approach to the monolithic integration of MEMS with CMOS

Smith,J.H., Montague,S., Sniegowski,J.J., Murray,J.R., Manginell,R.P., McWhorter,P.J., Huber,R.J.

SPIE-The International Society for Optical Engineering
2 Conference Proceedings Routes to failure in rotating MEMS devices experiencing sliding friction

Miller,S.L., LaVigne,C., Rodgers,M.S., Sniegowski,J.J., Waters,J.P., McWhorter,P.J.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Failure analysis of tungsten-coated polysilicon micromachined microengines

Walraven,J.A., Mani,S.S., Fleming,J.G., Headley,T.J., Kotula,P.G., Pimentel,A.A., Rye,M.J., Tanner,D.M., Smith,N.F.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Micro-electro-optical devices in a five-level polysilicon surface-micromachining technology (Invited Paper)

Smith,J.H., Rodgers,M.S., Sniegowski,S.L., Miller,S.L., Hetherington,D.L., McWhorter,P.J., Warren,M.E.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Material and processing issues for the monolithic integration of microelectronics with surface-micromachined polysilicon sensors and actuators

Smith,J.H., Montague,S., Sniegowski,J.J.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Advanced micromechanisms in a multilevel polysilicon technology

Rodgers,m.S., Sniegowski,J.J., Miller,S.L., Craig Barron,C., McWhorter,P.J.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Design and performance of a polysilicon surface-micromachined microengine realized with arrays of asymmetrical electrothermal microactuators

Kolesar,E.S., Ruff,M.D., Ko,S.Y., Wilks,R.J., Howard,J.T., Allen,P.B., Wilken,J.M., Bosch,J.E.

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Integrated mold/surface-micromachining process

Barron,C.C., Fleming,J.G., Montague,S., Sniegowski,J.J., Hetherington,D.L.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings Surface damage growth mitigation on KDP/DKDP optics using single-crystal diamond micromachining

Hrubesh, L.W., Adams, J.J., Feit, M.D., Sell, W.D., Stanley, J.A., Miller, E., Thompson, S.L., Whitman, P.K., Hackel, …

SPIE - The International Society of Optical Engineering
6 Conference Proceedings Linkage design effect on the reliability of surface-micromachined microengines driving a load

Tanner,D.M., Peterson,K.A., Irwin,L.A., Tangyunyong,P., Miller,W.M., Eaton,W.P., Smith,N.F., Rodgers,M.S.

SPIE-The International Society for Optical Engineering
12 Conference Proceedings Chemical vapor deposition coating for micromachines

Mani, S. S., Fleming, J. G., Sniegowski, J. J., Boer, M. P. de, Irwin, L. W., Walraven, J. A., Tanner, D. M., Dugger, M. …

MRS-Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12