Silicon accelerometers:generic design and operating principles and a case study

Silicon accelerometers:generic design and operating principles and a case study

Author(s):: Peeters,E. ( Xerox Wilson Ctr.for Research and Technology )
Publication title:: Micromachined devices and components II : 14-15 October 1996, Austin, Texas
Title of ser.:: Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:: 2882
Pub. Year:: 1996
Page(from):: 134
Page(to):: 146
Pub. info.:: Bellingham, WA: SPIE-The International Society for Optical Engineering
ISSN:: 0277786X
ISBN:: 9780819422804 [0819422800]
Language:: English
Call no.:: P63600/2882
Type:: Conference Proceedings

Details

TDL ID:	ZA00017495
Series ID:	PA00000029
Conf. info. (Name):	Micromachining and Microfabrication : Micromachined Devices and Components
Conf. info. (Number):	1996 : 2nd
Conf. info. (Venue):	Austin, TX, USA
Conf. info. (Date):	1996.10.14-1996.10.15

Similar Items:

1 Conference Proceedings Design and simulation of a multifinger micromechanical silicon accelerometer Dong, J., Qin, J. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Planar silicon accelerometer with fiber optic sensing: a system-level study John, J., Saha, I., Islam, R., Joseph, J., Lakshmipathy, V.V., Kanakaraju, K., Jain, Y.K., Alex, T.K. SPIE - The International Society of Optical Engineering
2 Conference Proceedings PAHs in compact HII regions Peeters, E. ESA Publications Division	8 Conference Proceedings Using transient conservative and environmental tracers to study water exchange in Lake Issyk-Kul Kipfer, R., Peeters, F. Kluwer Academic Publishers
3 Conference Proceedings Design,modeling,and verification of MEMS silicon torsion mirror Pan,F., Kubby,J.A., Peeters,E., Chen,J.K., Vitomirov,O., Taylor,D., Mukherjee,S. SPIE-The International Society for Optical Engineering	9 Conference Proceedings First-Principles Study of Vacancy-Assisted As Diffusion in Silicon Xie, J., Chen, S. P. MRS - Materials Research Society
4 Conference Proceedings Mineral surface science: principles, applications and case studies Putnis A., Becker U., Bosbach D. Kluwer	10 Conference Proceedings Optical Properties of Silicon Nanocrystals: A First Principles Study Chelikowsky, JamesR., Louie, StevenG., Ogut, Serdar. Materials Research Society
5 Conference Proceedings (170c) QbD for Generic Drugs: A Case Study for Immediate-Release Products Zhigang Sun American Institute of Chemical Engineers	11 Conference Proceedings First Principles Study of Boron in Amorphous Silicon Iván Santos, Wolfgang Windl, Lourdes Pelaz, Luis Alberto Marqués Materials Research Society
6 Conference Proceedings (170c) QbD for Generic Drugs: A Case Study for Immediate-Release Products Zhigang Sun American Institute of Chemical Engineers	12 Conference Proceedings Using Case Studies to Illustrate Global Waste Management Principles Hayes, K., Davis, M. L. American Institute of Chemical Engineers

1

2

3

4

5

6

7

8

9

10

11

12