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Requirements of future measurement equipment for silicon wafers

Author(s):
Publication title:
Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays : 8-9 August 1996, Denver, Colorado
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2862
Pub. Year:
1996
Page(from):
152
Page(to):
162
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819422507 [0819422509]
Language:
English
Call no.:
P63600/2862
Type:
Conference Proceedings

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