Lithography on PMMA-DR1 with reflection near-field optical microscopy(R-SNOM)and probe characterization

Lithography on PMMA-DR1 with reflection near-field optical microscopy(R-SNOM)and probe characterization

Author(s):

Davy,S. ( Univ.de Franche-Comte )
Rachard,G.
Spajer,M.

Publication title:

Optical Inspection and Micromeasurements

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

2782

Pub. Year:

1996

Page(from):

551

Page(to):

558

Pub. info.:

Bellingham, Wash.: SPIE-The International Society for Optical Engineering

ISSN:

0277786X

ISBN:

9780819421685 [0819421685]

Language:

English

Call no.:

P63600/2782

Type:

Conference Proceedings

Details

TDL ID:	ZA00017485
Series ID:	PA00000029
Conf. info. (Name):	Lasers, Optics, and Vision for Productivity in Manufacturing : Optical Inspection and Micromeasurements
Conf. info. (Number):	1996
Conf. info. (Venue):	Besancon, France
Conf. info. (Date):	1996.06.10-1996.06.14

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