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Surface deformation measurement by photothermal deflection technique

Author(s):
Publication title:
Optical Inspection and Micromeasurements
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2782
Pub. Year:
1996
Page(from):
504
Page(to):
512
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421685 [0819421685]
Language:
English
Call no.:
P63600/2782
Type:
Conference Proceedings

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