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High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchigrid as phase modulator

Author(s):
Dorrio,B.V. ( Univ.de Vigo )
Bugarin,J.
Alen,J.M.
Fernandez,A.
Doval,A.F.
Lopez,C.
Blanco-Garcia,J.
Fernandez,J.L.
Perez-Amor,M.
4 more
Publication title:
Optical Inspection and Micromeasurements
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
2782
Pub. Year:
1996
Page(from):
258
Page(to):
266
Pub. info.:
Bellingham, Wash.: SPIE-The International Society for Optical Engineering
ISSN:
0277786X
ISBN:
9780819421685 [0819421685]
Language:
English
Call no.:
P63600/2782
Type:
Conference Proceedings

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